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Jie Zhang
Wafer Fabrication [PDF ebook]
Automatic Material Handling System

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Couverture du Jie Zhang: Wafer Fabrication (PDF)

This book systematically introduces modeling, performance evaluation and applications of Automatic Materiel Handling System (AMHS) in semiconductor manufactucing, and focuses discussion on the coordination of two subsystems. Resources dispatch and optimization are conducted on operational research combined with cases studies. Written in a practical way, it is an essential reference for researchers and engineers in manufacturing and management.

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Langue Anglais ● Format PDF ● Pages 284 ● ISBN 9783110487473 ● Maison d’édition De Gruyter ● Publié 2018 ● Téléchargeable 3 fois ● Devise EUR ● ID 6965987 ● Protection contre la copie Adobe DRM

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