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Jie Zhang
Wafer Fabrication [PDF ebook]
Automatic Material Handling System

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Обкладинка Jie Zhang: Wafer Fabrication (PDF)

This book systematically introduces modeling, performance evaluation and applications of Automatic Materiel Handling System (AMHS) in semiconductor manufactucing, and focuses discussion on the coordination of two subsystems. Resources dispatch and optimization are conducted on operational research combined with cases studies. Written in a practical way, it is an essential reference for researchers and engineers in manufacturing and management.

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Мова Англійська ● Формат PDF ● Сторінки 284 ● ISBN 9783110487473 ● Видавець De Gruyter ● Опубліковано 2018 ● Завантажувані 3 разів ● Валюта EUR ● Посвідчення особи 6965987 ● Захист від копіювання Adobe DRM

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