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Jie Zhang
Wafer Fabrication [PDF ebook]
Automatic Material Handling System

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Sampul Jie Zhang: Wafer Fabrication (PDF)

This book systematically introduces modeling, performance evaluation and applications of Automatic Materiel Handling System (AMHS) in semiconductor manufactucing, and focuses discussion on the coordination of two subsystems. Resources dispatch and optimization are conducted on operational research combined with cases studies. Written in a practical way, it is an essential reference for researchers and engineers in manufacturing and management.

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Bahasa Inggris ● Format PDF ● Halaman 284 ● ISBN 9783110487473 ● Penerbit De Gruyter ● Diterbitkan 2018 ● Diunduh 3 kali ● Mata uang EUR ● ID 6965987 ● Perlindungan salinan Adobe DRM

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