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Jie Zhang
Wafer Fabrication [PDF ebook]
Automatic Material Handling System

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Cover of Jie Zhang: Wafer Fabrication (PDF)

This book systematically introduces modeling, performance evaluation and applications of Automatic Materiel Handling System (AMHS) in semiconductor manufactucing, and focuses discussion on the coordination of two subsystems. Resources dispatch and optimization are conducted on operational research combined with cases studies. Written in a practical way, it is an essential reference for researchers and engineers in manufacturing and management.

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Language English ● Format PDF ● Pages 284 ● ISBN 9783110487473 ● Publisher De Gruyter ● Published 2018 ● Downloadable 3 times ● Currency EUR ● ID 6965987 ● Copy protection Adobe DRM

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