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Jie Zhang
Wafer Fabrication [PDF ebook]
Automatic Material Handling System

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的封面 Jie Zhang: Wafer Fabrication (PDF)

This book systematically introduces modeling, performance evaluation and applications of Automatic Materiel Handling System (AMHS) in semiconductor manufactucing, and focuses discussion on the coordination of two subsystems. Resources dispatch and optimization are conducted on operational research combined with cases studies. Written in a practical way, it is an essential reference for researchers and engineers in manufacturing and management.

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语言英语 ● 格式 PDF ● 网页 284 ● ISBN 9783110487473 ● 出版者 De Gruyter ● 发布时间 2018 ● 下载 3 时 ● 货币 EUR ● ID 6965987 ● 复制保护 Adobe DRM

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