Scanning Electron Microscopy provides a description of the physics of electron-probe formation and of electron-specimen interactions. The different imaging and analytical modes using secondary and backscattered electrons, electron-beam-induced currents, X-ray and Auger electrons, electron channelling effects, and cathodoluminescence are discussed to evaluate specific contrasts and to obtain quantitative information.
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Langue Anglais ● Format PDF ● ISBN 9783540389675 ● Maison d’édition Springer Berlin Heidelberg ● Publié 2013 ● Téléchargeable 3 fois ● Devise EUR ● ID 6317814 ● Protection contre la copie Adobe DRM
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