Scanning Electron Microscopy provides a description of the physics of electron-probe formation and of electron-specimen interactions. The different imaging and analytical modes using secondary and backscattered electrons, electron-beam-induced currents, X-ray and Auger electrons, electron channelling effects, and cathodoluminescence are discussed to evaluate specific contrasts and to obtain quantitative information.
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语言 英语 ● 格式 PDF ● ISBN 9783540389675 ● 出版者 Springer Berlin Heidelberg ● 发布时间 2013 ● 下载 3 时 ● 货币 EUR ● ID 6317814 ● 复制保护 Adobe DRM
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