Scanning Electron Microscopy provides a description of the physics of electron-probe formation and of electron-specimen interactions. The different imaging and analytical modes using secondary and backscattered electrons, electron-beam-induced currents, X-ray and Auger electrons, electron channelling effects, and cathodoluminescence are discussed to evaluate specific contrasts and to obtain quantitative information.
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Taal Engels ● Formaat PDF ● ISBN 9783540389675 ● Uitgeverij Springer Berlin Heidelberg ● Gepubliceerd 2013 ● Downloadbare 3 keer ● Valuta EUR ● ID 6317814 ● Kopieerbeveiliging Adobe DRM
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