Jürgen Mohr & Oliver Paul 
Microsystem Technology [PDF ebook] 

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This completely revised edition of a bestselling concise introduction to microsystems technology includes the latest trends in this emerging scientific discipline. The chapters on silicium and LIGA technology are greatly expanded, whilst new topics include application aspects in medicine and health technology, lithography and electroplating.

€219.99
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Inhaltsverzeichnis

General Introduction to Microstructure Technology
The Parallels to Microelectrics
The Basis and Materials in Microtechnology
Basic Principles of Vacuum Technology
Litography
The Silicon Micromechanics
The LIGA Process
Alternative Process of Microstructuring
Construction and Junction Techniques (CJT)
System Technology

Über den Autor

Wolfgang Menz is the author of Microsystem Technology, published by Wiley.
Jürgen Mohr is the author of Microsystem Technology, published by Wiley.
Oliver Paul is the author of Microsystem Technology, published by Wiley.

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Sprache Englisch ● Format PDF ● ISBN 9783527613014 ● Dateigröße 39.8 MB ● Verlag Wiley-VCH ● Land DE ● Erscheinungsjahr 2008 ● Ausgabe 1 ● herunterladbar 24 Monate ● Währung EUR ● ID 2440850 ● Kopierschutz Adobe DRM
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