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Jürgen Mohr & Oliver Paul
Microsystem Technology [PDF ebook]

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的封面 Jürgen Mohr & Oliver Paul: Microsystem Technology (PDF)

This completely revised edition of a bestselling concise introduction to microsystems technology includes the latest trends in this emerging scientific discipline. The chapters on silicium and LIGA technology are greatly expanded, whilst new topics include application aspects in medicine and health technology, lithography and electroplating.

€219.99

表中的内容

General Introduction to Microstructure Technology
The Parallels to Microelectrics
The Basis and Materials in Microtechnology
Basic Principles of Vacuum Technology
Litography
The Silicon Micromechanics
The LIGA Process
Alternative Process of Microstructuring
Construction and Junction Techniques (CJT)
System Technology

关于作者

Wolfgang Menz is the author of Microsystem Technology, published by Wiley.
Jürgen Mohr is the author of Microsystem Technology, published by Wiley.
Oliver Paul is the author of Microsystem Technology, published by Wiley.

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语言英语 ● 格式 PDF ● ISBN 9783527613014 ● 文件大小 39.8 MB ● 出版者 Wiley-VCH ● 国家 DE ● 发布时间 2008 ● 版 1 ● 下载 24 个月 ● 货币 EUR ● ID 2440850 ● 复制保护 Adobe DRM

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