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Jürgen Mohr & Oliver Paul
Microsystem Technology [PDF ebook]

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This completely revised edition of a bestselling concise introduction to microsystems technology includes the latest trends in this emerging scientific discipline. The chapters on silicium and LIGA technology are greatly expanded, whilst new topics include application aspects in medicine and health technology, lithography and electroplating.

€219.99

Jadual kandungan

General Introduction to Microstructure Technology
The Parallels to Microelectrics
The Basis and Materials in Microtechnology
Basic Principles of Vacuum Technology
Litography
The Silicon Micromechanics
The LIGA Process
Alternative Process of Microstructuring
Construction and Junction Techniques (CJT)
System Technology

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Bahasa Inggeris ● Format PDF ● Halaman-halaman 500 ● ISBN 9783527613014 ● Saiz fail 39.8 MB ● Penerbit Wiley-VCH ● Diterbitkan 2008 ● Edisi 1 ● Muat turun 24 bulan ● Mata wang EUR ● ID 2440850 ● Salin perlindungan Adobe DRM

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Jurgen Mohr Oliver Paul Wolfgang Menz

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