This completely revised edition of a bestselling concise introduction to microsystems technology includes the latest trends in this emerging scientific discipline. The chapters on silicium and LIGA technology are greatly expanded, whilst new topics include application aspects in medicine and health technology, lithography and electroplating.
Inhoudsopgave
General Introduction to Microstructure Technology
The Parallels to Microelectrics
The Basis and Materials in Microtechnology
Basic Principles of Vacuum Technology
Litography
The Silicon Micromechanics
The LIGA Process
Alternative Process of Microstructuring
Construction and Junction Techniques (CJT)
System Technology
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Taal Engels ● Formaat PDF ● Pagina’s 500 ● ISBN 9783527613014 ● Bestandsgrootte 39.8 MB ● Uitgeverij Wiley-VCH ● Gepubliceerd 2008 ● Editie 1 ● Downloadbare 24 maanden ● Valuta EUR ● ID 2440850 ● Kopieerbeveiliging Adobe DRM
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