Jürgen Mohr & Oliver Paul 
Microsystem Technology [PDF ebook] 

Destek

This completely revised edition of a bestselling concise introduction to microsystems technology includes the latest trends in this emerging scientific discipline. The chapters on silicium and LIGA technology are greatly expanded, whilst new topics include application aspects in medicine and health technology, lithography and electroplating.

€219.99
Ödeme metodları

İçerik tablosu

General Introduction to Microstructure Technology
The Parallels to Microelectrics
The Basis and Materials in Microtechnology
Basic Principles of Vacuum Technology
Litography
The Silicon Micromechanics
The LIGA Process
Alternative Process of Microstructuring
Construction and Junction Techniques (CJT)
System Technology

Yazar hakkında

Wolfgang Menz is the author of Microsystem Technology, published by Wiley.
Jürgen Mohr is the author of Microsystem Technology, published by Wiley.
Oliver Paul is the author of Microsystem Technology, published by Wiley.

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Dil İngilizce ● Biçim PDF ● ISBN 9783527613014 ● Dosya boyutu 39.8 MB ● Yayımcı Wiley-VCH ● Ülke DE ● Yayınlanan 2008 ● Baskı 1 ● İndirilebilir 24 aylar ● Döviz EUR ● Kimlik 2440850 ● Kopya koruma Adobe DRM
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