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Jürgen Mohr & Oliver Paul
Microsystem Technology [PDF ebook]

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Cover of Jürgen Mohr & Oliver Paul: Microsystem Technology (PDF)

This completely revised edition of a bestselling concise introduction to microsystems technology includes the latest trends in this emerging scientific discipline. The chapters on silicium and LIGA technology are greatly expanded, whilst new topics include application aspects in medicine and health technology, lithography and electroplating.

€219.99

Table of Content

General Introduction to Microstructure Technology
The Parallels to Microelectrics
The Basis and Materials in Microtechnology
Basic Principles of Vacuum Technology
Litography
The Silicon Micromechanics
The LIGA Process
Alternative Process of Microstructuring
Construction and Junction Techniques (CJT)
System Technology

About the author

Wolfgang Menz is the author of Microsystem Technology, published by Wiley.
Jürgen Mohr is the author of Microsystem Technology, published by Wiley.
Oliver Paul is the author of Microsystem Technology, published by Wiley.

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Language English ● Format PDF ● ISBN 9783527613014 ● File size 39.8 MB ● Publisher Wiley-VCH ● Country DE ● Published 2008 ● Edition 1 ● Downloadable 24 months ● Currency EUR ● ID 2440850 ● Copy protection Adobe DRM

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