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Jürgen Mohr & Oliver Paul
Microsystem Technology [PDF ebook]

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Copertina di Jürgen Mohr & Oliver Paul: Microsystem Technology (PDF)

This completely revised edition of a bestselling concise introduction to microsystems technology includes the latest trends in this emerging scientific discipline. The chapters on silicium and LIGA technology are greatly expanded, whilst new topics include application aspects in medicine and health technology, lithography and electroplating.

€219.99

Tabella dei contenuti

General Introduction to Microstructure Technology
The Parallels to Microelectrics
The Basis and Materials in Microtechnology
Basic Principles of Vacuum Technology
Litography
The Silicon Micromechanics
The LIGA Process
Alternative Process of Microstructuring
Construction and Junction Techniques (CJT)
System Technology

Circa l’autore

Wolfgang Menz is the author of Microsystem Technology, published by Wiley.
Jürgen Mohr is the author of Microsystem Technology, published by Wiley.
Oliver Paul is the author of Microsystem Technology, published by Wiley.

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Lingua Inglese ● Formato PDF ● ISBN 9783527613014 ● Dimensione 39.8 MB ● Casa editrice Wiley-VCH ● Paese DE ● Pubblicato 2008 ● Edizione 1 ● Scaricabile 24 mesi ● Moneta EUR ● ID 2440850 ● Protezione dalla copia Adobe DRM

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