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Jürgen Mohr & Oliver Paul
Microsystem Technology [PDF ebook]

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Portada de Jürgen Mohr & Oliver Paul: Microsystem Technology (PDF)

This completely revised edition of a bestselling concise introduction to microsystems technology includes the latest trends in this emerging scientific discipline. The chapters on silicium and LIGA technology are greatly expanded, whilst new topics include application aspects in medicine and health technology, lithography and electroplating.

€219.99

Tabla de materias

General Introduction to Microstructure Technology
The Parallels to Microelectrics
The Basis and Materials in Microtechnology
Basic Principles of Vacuum Technology
Litography
The Silicon Micromechanics
The LIGA Process
Alternative Process of Microstructuring
Construction and Junction Techniques (CJT)
System Technology

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Idioma Inglés ● Formato PDF ● Páginas 500 ● ISBN 9783527613014 ● Tamaño de archivo 39.8 MB ● Editorial Wiley-VCH ● Publicado 2008 ● Edición 1 ● Descargable 24 meses ● Divisa EUR ● ID 2440850 ● Protección de copia Adobe DRM

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