This completely revised edition of a bestselling concise introduction to microsystems technology includes the latest trends in this emerging scientific discipline. The chapters on silicium and LIGA technology are greatly expanded, whilst new topics include application aspects in medicine and health technology, lithography and electroplating.
Cuprins
General Introduction to Microstructure TechnologyThe Parallels to Microelectrics
The Basis and Materials in Microtechnology
Basic Principles of Vacuum Technology
Litography
The Silicon Micromechanics
The LIGA Process
Alternative Process of Microstructuring
Construction and Junction Techniques (CJT)
System Technology
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Limba Engleză ● Format PDF ● Pagini 500 ● ISBN 9783527613014 ● Mărime fișier 39.8 MB ● Editura Wiley-VCH ● Publicat 2008 ● Ediție 1 ● Descărcabil 24 luni ● Valută EUR ● ID 2440850 ● Protecție împotriva copiilor Adobe DRM
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