Eric Garfunkel & Evgeni Gusev 
Fundamental Aspects of Ultrathin Dielectrics on Si-based Devices [PDF ebook] 

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An extrapolation of ULSI scaling trends indicates that minimum feature sizes below 0.1 mu and gate thicknesses of Audience: Both expert scientists and engineers who wish to keep up with cutting edge research, and new students who wish to learn more about the exciting basic research issues relevant to next-generation device technology.

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Language English ● Format PDF ● ISBN 9789401150088 ● Editor Eric Garfunkel & Evgeni Gusev ● Publisher Springer Netherlands ● Published 2012 ● Downloadable 3 times ● Currency EUR ● ID 4705911 ● Copy protection Adobe DRM
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